Analysis of Micro Meniscus Shape by Light Scattering

It is important to analyze a micro meniscus shape formed at a small nozzle apex in order to optimize a dispense performance in liquid spin coating. A meniscus bridge of deionized (DI) water is formed at a small gap between two nozzles and its curvature radius is changed due to water evaporation. Whe...

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Bibliographic Details
Published in:Journal of Photopolymer Science and Technology 2007, Vol.20(6), pp.781-782
Main Authors: Yamanaka, Masaki, Kawai, Akira
Format: Article
Language:English
Subjects:
coating
Curvature
Deionization
Evaporation
light scattering
Liquids
Mathematical analysis
Monitoring
nozzle
Nozzles
resist
Spin coating
water meniscus
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Summary:It is important to analyze a micro meniscus shape formed at a small nozzle apex in order to optimize a dispense performance in liquid spin coating. A meniscus bridge of deionized (DI) water is formed at a small gap between two nozzles and its curvature radius is changed due to water evaporation. When the incident light enters the meniscus bridge, the light is scattered depending on the meniscus shape. By monitoring the permitted light intensity passed through the meniscus bridge, the formation and vanishing mechanisms of the meniscus bridge can be discussed.
ISSN:0914-9244
1349-6336
1349-6336
DOI:10.2494/photopolymer.20.781