Fabrication of micro-lens array using quartz wet etching and polymer

This paper presents the fabrication and test of a micro-lens array (MLA) made of quartz substrate and UV adhesive. Numerical analysis of optics was used to find the optimal design parameters such as radius of curvature and etching depth of the micro lens. The fabricated device has an array of 1024 ×...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2010-11, Vol.164 (1), p.161-167
Main Authors: Oh, Haekwan, Kim, Geunyoung, Seo, Hyunwoo, Song, Yotak, Lee, Keekeun, Yang, Sang Sik
Format: Article
Language:English
Subjects:
Adhesives
Arrays
Etching
Focal length
Humidity
Lenses
Micro-lens array (MLA)
Optimization
Quartz
Radius of curvature
UV adhesive
Wet etching
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Summary:This paper presents the fabrication and test of a micro-lens array (MLA) made of quartz substrate and UV adhesive. Numerical analysis of optics was used to find the optimal design parameters such as radius of curvature and etching depth of the micro lens. The fabricated device has an array of 1024 × 768 lenses. The dimension of each lens is 13.68 μm × 13.68 μm. A quartz substrate which is a stable material at harsh environment was etched isotropically with buffered oxide etchant (BOE). We found the optimal wet etching time of quartz. We spin-coated UV adhesive on quartz substrate to complete the micro-lens array. The fill factor was almost 100%. The focal length depending on the radius of curvature and thickness of UV adhesive is in the range from 28.1 to 45.4 μm. The FWHM (full width at half maximum) of the spot size is about 1.5 μm in case of the sample etched for 95 min at 23 °C and 50% absolute humidity. Experimental tests demonstrated that each lens is fabricated successfully.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2010.10.003