Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography

A new fabrication approach, self‐aligned membrane projection lithography, is used to create composite split ring resonators with a resonance near 10 μm. The composite resonators are oriented on the interior face of approximately‐spheroidal cavities, and hence represent the first instance of fabricat...

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Bibliographic Details
Published in:Advanced materials (Weinheim) 2010-08, Vol.22 (29), p.3171-3175
Main Authors: Burckel, D. Bruce, Wendt, Joel R., Ten Eyck, Gregory A., Ellis, A. Robert, Brener, Igal, Sinclair, Michael B.
Format: Article
Language:English
Subjects:
Composite Materials
Holes
Lithography
Membranes
Metamaterials
Nanotechnology - methods
Photonic Crystals
Photonics
Polymethyl Methacrylate - chemistry
Projection
Resonators
Self alignment
Spectroscopy, Fourier Transform Infrared
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Summary:A new fabrication approach, self‐aligned membrane projection lithography, is used to create composite split ring resonators with a resonance near 10 μm. The composite resonators are oriented on the interior face of approximately‐spheroidal cavities, and hence represent the first instance of fabrication of micrometer‐scale SRRs with out‐of‐plane current flow.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200904153