Multifunctional FeCo/TiN Multilayer Thin Films with Combined Magnetic and Protective Properties

Coatings with thicknesses ranging from a few nanometer up to several micrometer produced by physical vapor deposition (PVD) processes have been established in engineering technologies since the early 1980s. In particular, magnetron sputtered wear resistance coatings are industrially established and...

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Bibliographic Details
Published in:Advanced engineering materials 2009-12, Vol.11 (12), p.969-975
Main Authors: Klever, Christian, Stüber, Michael, Leiste, Harald, Nold, Eberhard, Seemann, Klaus, Ulrich, Sven, Brunken, Hayo, Ludwig, Alfred, Thede, Claas, Quandt, Eckhard
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
ferromagnetic films
Interfacial magnetic properties (multilayers, magnetic quantum wells, superlattices, magnetic heterostructures)
Magnetic properties and materials
Magnetic properties of surface, thin films and multilayers
magnetron sputtering
Mechanical and acoustical properties
Physical properties of thin films, nonelectronic
physical vapor deposition
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Thin films
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Summary:Coatings with thicknesses ranging from a few nanometer up to several micrometer produced by physical vapor deposition (PVD) processes have been established in engineering technologies since the early 1980s. In particular, magnetron sputtered wear resistance coatings are industrially established and capable to enhance tool lifetimes significantly. However, in cases where optical inspection of a coating in use is not possible, an intrinsic sensor function of the film would be beneficial. Therefore, the development of wear resistant coatings with an integrated sensor functionality based on the insertion of a magnetoelastic ferromagnetic phase is suggested. In combination with appropriate read‐out electronics such a film system would be ready for online monitoring of the coatings' actual state (e.g., strain, temperature, volume loss). This paper focuses on the development of wear resistance coatings which simultaneously supply beneficial mechanical properties as well as ferromagnetic properties optimized for online non‐contact read‐out applications. Multilayer coatings obtained through alternate stacking of magnetron sputtered TiN and FeCo layers with a nominal total thickness of 1000 nm were produced as a model system meeting the above conditions. The bilayer period was varied down to 2.6 nm while the individual layer thickness ratio tTiN/tFeCo was determined by the deposition rates and maintained constant at a value of about 3/1. The films were vacuum annealed ex situ in a static magnetic field subsequent to the deposition. The constitution of the as‐deposited and annealed coatings as well as their mechanical (nanohardness, Young's modulus) and magnetic properties (magnetization hysteresis, frequency‐dependent permeability) are described. Finally, the suitability of the coatings for the use in remote‐interrogable wear sensor applications is briefly discussed. This paper focuses on the development of coatings intended for use in remote‐interrogable wear sensor applications. Ferromagnetic FeCo providing sensor functionality and TiN as hard coating were combined in multilayer films with low bilayer periods of down to 2.6 nm. FeCo/TiN multilayer films with low coercive field (μ0HC 
ISSN:1438-1656
1527-2648
DOI:10.1002/adem.200900214