Synthetic infrared spectra

We have designed, microfabricated, and characterized a diffractive optical element that reproduces the infrared spectrum of HF from 3600 to 4300 cm(-1) . The reflection-mode diffractive optic consists of 4096 lines, each 4.5mum wide, at 16 discrete depths relative to the substrate from 0 to 1.2 mum...

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Bibliographic Details
Published in:Optics letters 1997-07, Vol.22 (13), p.1036-1038
Main Authors: Sinclair, M B, Butler, M A, Kravitz, S H, Zubrzycki, W J, Ricco, A J
Format: Article
Language:English
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Summary:We have designed, microfabricated, and characterized a diffractive optical element that reproduces the infrared spectrum of HF from 3600 to 4300 cm(-1) . The reflection-mode diffractive optic consists of 4096 lines, each 4.5mum wide, at 16 discrete depths relative to the substrate from 0 to 1.2 mum and was fabricated upon a silicon wafer by anisotropic reactive ion-beam etching in a four-mask-level process. We envisage the use of diffractive optical elements of this type as the basis for a new class of miniaturized, remote chemical sensor systems based on correlation spectroscopy.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.22.001036