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Early Results from an Aberration-Corrected JEOL 2200FS STEM/TEM at Oak Ridge National Laboratory
The resolution-limiting aberrations of round electromagnetic lenses can now be successfully overcome via the use of multipole element “aberration correctors.” The installation and performance of a hexapole-based corrector (CEOS GmbH) integrated on the probe-forming side of a JEOL 2200FS FEG STEM/TEM...
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Published in: | Microscopy and microanalysis 2006-12, Vol.12 (6), p.483-491 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The resolution-limiting aberrations of round electromagnetic lenses
can now be successfully overcome via the use of multipole element
“aberration correctors.” The installation and performance of a
hexapole-based corrector (CEOS GmbH) integrated on the probe-forming side
of a JEOL 2200FS FEG STEM/TEM is described. For the resolution of the
microscope not to be severely compromised by its environment, a new,
specially designed building at Oak Ridge National Laboratory has been
built. The Advanced Microscopy Laboratory was designed with the goal of
providing a suitable location for aberration-corrected electron
microscopes. Construction methods and performance of the building are
discussed in the context of the performance of the microscope. Initial
performance of the microscope on relevant specimens and modifications made
to eliminate resolution-limiting conditions are also discussed. |
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ISSN: | 1431-9276 1435-8115 |
DOI: | 10.1017/S1431927606060570 |