Ultraviolet/ozone cleaning of a soft x-ray grating contaminated by synchrotron radiation

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Bibliographic Details
Published in:Applied optics (2004) 1991-04, Vol.30 (10), p.1165-1168
Main Authors: Harada, T, Yamaguchi, S, Itou, M, Mitani, S, Maezawa, H, Mikuni, A, Okamoto, W, Yamaoka, H
Format: Article
Language:English
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ISSN:1559-128X
2155-3165
DOI:10.1364/ao.30.001165