Interfacial Chemistries for Nanoscale Transfer Printing

We describe a patterning technique that uses self-assembled monolayers and other surface chemistries for guiding the transfer of material from relief features on a stamp to a substrate. This purely additive contact printing technique is capable of nanometer resolution. Pattern transfer is fast and i...

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Bibliographic Details
Published in:Journal of the American Chemical Society 2002-07, Vol.124 (26), p.7654-7655
Main Authors: Loo, Yueh-Lin, Willett, Robert L, Baldwin, Kirk W, Rogers, John A
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Physics
Surface treatments
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Summary:We describe a patterning technique that uses self-assembled monolayers and other surface chemistries for guiding the transfer of material from relief features on a stamp to a substrate. This purely additive contact printing technique is capable of nanometer resolution. Pattern transfer is fast and it occurs at ambient conditions. We illustrate the versatility of this method by printing single-layer metal patterns with feature sizes from a few tens of microns to a few tens of nanometers. We also demonstrate its use for patterning, in a single step, metal/dielectric/metal multilayers for functional thin film capacitors on plastic substrates.
ISSN:0002-7863
1520-5126
DOI:10.1021/ja026355v