Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits

A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while th...

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Bibliographic Details
Published in:Optics letters 2003-11, Vol.28 (21), p.2058-2060
Main Authors: Kiwa, Toshihiko, Tonouchi, Masayoshi, Yamashita, Masatsugu, Kawase, Kodo
Format: Article
Language:English
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Summary:A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection.
ISSN:0146-9592
1539-4794
DOI:10.1364/ol.28.002058