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Pushing the boundaries of local oxidation nanolithography: Short timescales and high speeds
Fabrication of nanometre-scale structures in short timescales and with high throughput has great importance in the future of nanoscale science and technology. We show that the local oxidation of hydrogen-passivated silicon surfaces by intermittent-contact mode atomic force microscopy can be applied...
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| Published in: | Ultramicroscopy 2008-09, Vol.108 (10), p.1120-1123 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
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| cited_by | cdi_FETCH-LOGICAL-c366t-30226b4257f0eaede810643b3587587dda42496182709d23831efebfbdab84b63 |
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| cites | cdi_FETCH-LOGICAL-c366t-30226b4257f0eaede810643b3587587dda42496182709d23831efebfbdab84b63 |
| container_end_page | 1123 |
| container_issue | 10 |
| container_start_page | 1120 |
| container_title | Ultramicroscopy |
| container_volume | 108 |
| creator | Vicary, J.A. Miles, M.J. |
| description | Fabrication of nanometre-scale structures in short timescales and with high throughput has great importance in the future of nanoscale science and technology. We show that the local oxidation of hydrogen-passivated silicon surfaces by intermittent-contact mode atomic force microscopy can be applied on timescales as low as 500
ns to create single oxide nanostructures with dimensions of 0.6×15
nm
2. Furthermore, we report on preliminary experiments demonstrating that local oxidation can also be achieved with relative tip-sample speeds in excess of 2
cm
s
−1 in order to pattern larger areas. This was realised using a high-speed scan stage based on a quartz crystal resonator operating at 20
kHz. |
| doi_str_mv | 10.1016/j.ultramic.2008.04.061 |
| format | article |
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ns to create single oxide nanostructures with dimensions of 0.6×15
nm
2. Furthermore, we report on preliminary experiments demonstrating that local oxidation can also be achieved with relative tip-sample speeds in excess of 2
cm
s
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ns to create single oxide nanostructures with dimensions of 0.6×15
nm
2. Furthermore, we report on preliminary experiments demonstrating that local oxidation can also be achieved with relative tip-sample speeds in excess of 2
cm
s
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ns to create single oxide nanostructures with dimensions of 0.6×15
nm
2. Furthermore, we report on preliminary experiments demonstrating that local oxidation can also be achieved with relative tip-sample speeds in excess of 2
cm
s
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| fulltext | fulltext |
| identifier | ISSN: 0304-3991 |
| ispartof | Ultramicroscopy, 2008-09, Vol.108 (10), p.1120-1123 |
| issn | 0304-3991 1879-2723 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_69483263 |
| source | ScienceDirect Journals |
| subjects | Atomic force microscopy Local oxidation Nanofabrication |
| title | Pushing the boundaries of local oxidation nanolithography: Short timescales and high speeds |
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