Supported Particle Track Etched Polyimide Membranes:  A Grazing Incidence Small-Angle X-ray Scattering Study

Particle track etched polyimide membranes on silicon substrates covered with a native oxide layer are investigated. Preparation steps similar to the common classical particle track etched membrane production, giving rise to free-standing membranes, are successfully applied to the supported membranes...

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Bibliographic Details
Published in:Langmuir 2004-11, Vol.20 (23), p.10303-10310
Main Authors: Hermsdorf, N, Sahre, K, Volodin, P, Stamm, M, Eichhorn, K. J, Cunis, S, Gehrke, R, Panagiotou, P, Titz, T, Müller-Buschbaum, P
Format: Article
Language:English
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Summary:Particle track etched polyimide membranes on silicon substrates covered with a native oxide layer are investigated. Preparation steps similar to the common classical particle track etched membrane production, giving rise to free-standing membranes, are successfully applied to the supported membranes. Polyimide films are used as a starting material for a template preparation based on high energy ion irradiation. The film/membrane structure is probed at different length scales by grazing incidence small-angle X-ray scattering at each individual preparation step. In addition, characterization with atomic force microscopy, variable-angle spectroscopic ellipsometry, Fourier transform infrared transmission, and attenuated total reflection spectroscopy is performed. An amount of 6 ± 1 vol % pores inside the polyimide film is detected. The pores are oriented perpendicular to the substrate surface and have a conical shape, yielding a slightly reduced pore size at the substrate/film interface.
ISSN:0743-7463
1520-5827
DOI:10.1021/la048313l