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Nonlinear Distributed Model for Bulk Acoustic Wave Resonators

This work expands the model proposed by Krimtholz, Leedom, and Matthaei (KLM) model to account for the nonlinear effects occurring in acoustic devices due to the nonlinear stiffened elasticity. We show that a nonlinear distributed capacitance in the acoustic transmission line of the KLM model can ac...

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Published in:IEEE transactions on microwave theory and techniques 2009-12, Vol.57 (12), p.3019-3029
Main Authors: Collado, C., Rocas, E., Mateu, J., Padilla, A., O'Callaghan, J.M.
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cited_by cdi_FETCH-LOGICAL-c536t-d2c3466d97a910306ce14f554bf7a385b9222987eb4af5f16c7efc176808ee933
cites cdi_FETCH-LOGICAL-c536t-d2c3466d97a910306ce14f554bf7a385b9222987eb4af5f16c7efc176808ee933
container_end_page 3029
container_issue 12
container_start_page 3019
container_title IEEE transactions on microwave theory and techniques
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creator Collado, C.
Rocas, E.
Mateu, J.
Padilla, A.
O'Callaghan, J.M.
description This work expands the model proposed by Krimtholz, Leedom, and Matthaei (KLM) model to account for the nonlinear effects occurring in acoustic devices due to the nonlinear stiffened elasticity. We show that a nonlinear distributed capacitance in the acoustic transmission line of the KLM model can account for the distributed nature of the nonlinear effects. Specifically, we use the nonlinear telegrapher's equation to find closed-form equations for intermodulation distortion and harmonic generation. We confirm the validity of these equations by comparing their results with those provided by a KLM equivalent circuit in which the nonlinear transmission line is implemented by cascading many L - C cells having a voltage-dependent capacitance. To further confirm the model, we show measured nonlinear effects in a thin film bulk acoustic resonator in close agreement with the equivalent circuit simulations.
doi_str_mv 10.1109/TMTT.2009.2034211
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ispartof IEEE transactions on microwave theory and techniques, 2009-12, Vol.57 (12), p.3019-3029
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1557-9670
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source IEEE Electronic Library (IEL) Journals
subjects Acoustic devices
Acoustic waves
Acoustics
and Matthaei (KLM)
Applied sciences
Bulk acoustic wave (BAW)
Bulk acoustic wave (BAW)Film bulk acousticResonator
Capacitance
Circuit properties
Elasticity
Electric, optical and optoelectronic circuits
Electronics
Enginyeria de la telecomunicació
Equivalent circuits
Exact sciences and technology
Exact solutions
film bulk acoustic resonator
Frequency conversion
harmonic generation
Intermodulation distortion
Leedom
Mathematical analysis
Mathematical models
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Nonlinear acoustics
Nonlinear equations
nonlinear Krimtholz
nonlinear stiffened elasticity
Nonlinear theories
nonlinearities
Nonlinearity
Ones
Resonator
Resonators
Theoretical study. Circuits analysis and design
Transmission lines
Àrees temàtiques de la UPC
title Nonlinear Distributed Model for Bulk Acoustic Wave Resonators
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