Nonlinear Distributed Model for Bulk Acoustic Wave Resonators

This work expands the model proposed by Krimtholz, Leedom, and Matthaei (KLM) model to account for the nonlinear effects occurring in acoustic devices due to the nonlinear stiffened elasticity. We show that a nonlinear distributed capacitance in the acoustic transmission line of the KLM model can ac...

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Bibliographic Details
Published in:IEEE transactions on microwave theory and techniques 2009-12, Vol.57 (12), p.3019-3029
Main Authors: Collado, C., Rocas, E., Mateu, J., Padilla, A., O'Callaghan, J.M.
Format: Article
Language:English
Subjects:
Acoustic devices
Acoustic waves
Acoustics
and Matthaei (KLM)
Applied sciences
Bulk acoustic wave (BAW)
Bulk acoustic wave (BAW)Film bulk acousticResonator
Capacitance
Circuit properties
Elasticity
Electric, optical and optoelectronic circuits
Electronics
Enginyeria de la telecomunicació
Equivalent circuits
Exact sciences and technology
Exact solutions
film bulk acoustic resonator
Frequency conversion
harmonic generation
Intermodulation distortion
Leedom
Mathematical analysis
Mathematical models
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Nonlinear acoustics
Nonlinear equations
nonlinear Krimtholz
nonlinear stiffened elasticity
Nonlinear theories
nonlinearities
Nonlinearity
Ones
Resonator
Resonators
Theoretical study. Circuits analysis and design
Transmission lines
Àrees temàtiques de la UPC
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Description
Summary:This work expands the model proposed by Krimtholz, Leedom, and Matthaei (KLM) model to account for the nonlinear effects occurring in acoustic devices due to the nonlinear stiffened elasticity. We show that a nonlinear distributed capacitance in the acoustic transmission line of the KLM model can account for the distributed nature of the nonlinear effects. Specifically, we use the nonlinear telegrapher's equation to find closed-form equations for intermodulation distortion and harmonic generation. We confirm the validity of these equations by comparing their results with those provided by a KLM equivalent circuit in which the nonlinear transmission line is implemented by cascading many L - C cells having a voltage-dependent capacitance. To further confirm the model, we show measured nonlinear effects in a thin film bulk acoustic resonator in close agreement with the equivalent circuit simulations.
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2009.2034211