Fabrication of UV detectors based on ZnO nanowires using silicon microchannel

Aligned ZnO nanowires were grown by metal organic chemical vapor deposition on patterned silicon substrate. The shape of nanostructures was greatly influenced by the micropatterned surface. The aspect ratio, packing fraction and the number density of nanowires on top surface are around 10, 0.8 and 1...

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Bibliographic Details
Published in:Journal of crystal growth 2009-06, Vol.311 (12), p.3305-3309
Main Authors: Kar, J.P., Das, S.N., Choi, J.H., Lee, Y.A., Lee, T.Y., Myoung, J.M.
Format: Article
Language:English
Subjects:
A1. Etching
A1. Nanostructures
A3. Metal organic chemical vapor deposition
B1. Zinc oxide
B3. UV detector
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Methods of nanofabrication
Nanoscale materials and structures: fabrication and characterization
Other topics in nanoscale materials and structures
Physics
Quantum wires
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Summary:Aligned ZnO nanowires were grown by metal organic chemical vapor deposition on patterned silicon substrate. The shape of nanostructures was greatly influenced by the micropatterned surface. The aspect ratio, packing fraction and the number density of nanowires on top surface are around 10, 0.8 and 107 per mm2, respectively, whereas the values are 20, 0.3 and 5×107 per mm2, respectively, towards the bottom of the cavity. XRD patterns suggest that the nanostructures have good crystallinity. High-resolution transmission electron microscopy confirmed the single-crystalline growth of the ZnO nanowires along the [0001] direction. Photosensitivity of the nanowires, grown on both top and bottom surface of the microchannel, was observed. However, the nanowires grown on bottom surface have shown better UV response with base line recovery at dark condition.
ISSN:0022-0248
1873-5002
DOI:10.1016/j.jcrysgro.2009.04.005