A capacitive sensor for non-contact nanoliter droplet detection

This paper reports on a sensor for the detection of microdroplets in flight. The presented sensor is based on a capacitive principle, which allows for non-contact monitoring of a complete droplet dispensing process. In the presented experiments the change in capacity caused by liquid droplets in the...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2009-06, Vol.153 (1), p.57-63
Main Authors: Ernst, A., Streule, W., Schmitt, N., Zengerle, R., Koltay, P.
Format: Article
Language:English
Subjects:
Capacitive sensor
Nanoliter dispensing
Non-contact detection
Process control
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Summary:This paper reports on a sensor for the detection of microdroplets in flight. The presented sensor is based on a capacitive principle, which allows for non-contact monitoring of a complete droplet dispensing process. In the presented experiments the change in capacity caused by liquid droplets in the range of a few nanoliters passing through the electric field of the sensor is studied. From the capacitive change the droplet presence can be deduced with a reliability of 100%, which means that every single droplet dispensed within the experiments caused a significant signal change. In addition, the sensor signal is sensitive to the droplet's volume V, dielectric constant ɛ r (epsilon) and velocity v . It turns out that every specific droplet exhibits a characteristic “fingerprint” signal depending on these parameters. Especially the droplet volume correlates very well with the peak value of the extracted signal. Therefore, the calibrated sensor is able to determine the volume of dispensed droplets in the range from 20 to 65 nl with a resolution of less than 2 nl. Furthermore, the printed circuit board (PCB) technology applied for fabrication of the sensor enables a very cost efficient and flexible realisation of the whole sensor unit. The non-contact capacitive principle prevents contamination and loss of media. Therefore, the proposed approach is well suited for high precision droplet presence detection and low cost online monitoring of liquid volumes in microdispensing processes for various applications.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2009.04.023