Direct Contact-Area Computation for MEMS Using Real Topographic Surface Data

Direct computation of interfacial contact area for microelectromechanical-system applications was performed numerically using the measured device surface topography and the material hardness to define the flow stress of an individual element. The simulation results compared well with the established...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2007-10, Vol.16 (5), p.1263-1268
Main Authors: Dickrell, D.J., Dugger, M.T., Hamilton, M.A., Sawyer, W.G.
Format: Article
Language:English
Subjects:
Area measurement
Computation
Computational modeling
Computer interfaces
Contact
Contact mechanical factors
contacts
Devices
Distributed computing
Exact sciences and technology
Fluid flow measurement
friction
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mathematical models
Mechanical instruments, equipment and techniques
Microelectromechanical systems
Micromechanical devices
Micromechanical devices and systems
Performance evaluation
Physics
Spatial distribution
Spots
Stress measurement
Surface topography
Topography
Visualization
Yield strength
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Description
Summary:Direct computation of interfacial contact area for microelectromechanical-system applications was performed numerically using the measured device surface topography and the material hardness to define the flow stress of an individual element. The simulation results compared well with the established contact-area determination methods and also introduced new capabilities that enabled the visualization of the spatial distribution of contact spots to be computationally mapped and rendered directly onto device surfaces.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2007.901120