Selective laser sintering of barium titanate–polymer composite films

A selective laser sintering process has been used to consolidate electro-ceramic thin films on silicon substrates. Methods of forming pre-positioned layers of barium titanate were investigated by spin-coating the feedstock powder mixed with a commercial polymer photo-resist. The ceramic–polymer comp...

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Bibliographic Details
Published in:Journal of materials science 2008-05, Vol.43 (9), p.3197-3202
Main Authors: Clare, A. T, Chalker, P. R, Davies, S, Sutcliffe, C. J, Tsopanos, S
Format: Article
Language:English
Subjects:
Applied sciences
Barium
barium titanate
Barium titanates
Building materials. Ceramics. Glasses
Ceramic industries
Ceramic powders
Characterization and Evaluation of Materials
Chemical industry and chemicals
Chemistry and Materials Science
Classical Mechanics
composite materials
Consolidation
Crystallography and Scattering Methods
Electric power generation
Electrotechnical and electronic ceramics
Exact sciences and technology
exposure duration
feedstocks
films (materials)
Forming
Laser processing
Laser sintering
Lasers
Materials Science
Microstructure
nickel
Parameter identification
Piezoelectricity
Polymer films
Polymer matrix composites
Polymer Sciences
Polymers
Process parameters
Rapid prototyping
Selective laser sintering
silicon
Silicon substrates
Solid Mechanics
Spin coating
Technical ceramics
Thin films
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Description
Summary:A selective laser sintering process has been used to consolidate electro-ceramic thin films on silicon substrates. Methods of forming pre-positioned layers of barium titanate were investigated by spin-coating the feedstock powder mixed with a commercial polymer photo-resist. The ceramic–polymer composite was deposited directly onto a nickel film which was evaporated onto a silicon substrate, pre-oxidised to form an electrically insulating layer. A range of laser processing parameters was identified in which consolidated barium titanate layers could be formed. The laser power was found to be more influential in forming sintered microstructures than laser exposure time. The microstructure of barium titanate films is sensitive to the SLS laser-processing conditions, with the optimum laser powers for the processing of the BaTiO₃–polymer found to be in the range 17–20 W. This article highlights the possibility of using ‘direct write’ techniques to produce piezoelectric materials upon silicon substrates.
ISSN:0022-2461
1573-4803
DOI:10.1007/s10853-007-2396-x