Removal of SU-8 photoresist using buckling-driven delamination assisted with a carbon dioxide snow jet for microfluidics fabrication

A new, environmentally friendly, inexpensive and non-destructive method for removing SU-8 after being an electroplating mold in microfluidic fabrication is demonstrated in this paper. A controllable thermal delaminating method assisted by an efficient high-speed aerosol jet consisting of two major s...

Full description

Saved in:
Bibliographic Details
Published in:Journal of micromechanics and microengineering 2007-12, Vol.17 (12), p.2447-2453
Main Authors: Yang, Sheng-Chung, Lin, Yu-Cheng
Format: Article
Language:English
Subjects:
Applied fluid mechanics
Applied sciences
Electronics
Exact sciences and technology
Fluid dynamics
Fluidics
Fundamental areas of phenomenology (including applications)
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A new, environmentally friendly, inexpensive and non-destructive method for removing SU-8 after being an electroplating mold in microfluidic fabrication is demonstrated in this paper. A controllable thermal delaminating method assisted by an efficient high-speed aerosol jet consisting of two major steps, delamination followed by removal by lifting, is presented. Experiments with the thermal process, operated at a rising temperature DeltaT of 340 deg C for 30 min, were carried out. Four delaminations were observed and the critical buckling stresses were calculated to be 38.98, 35.24, 42.04 and 41.26 MPa, respectively. The results show that these delaminations occurred at a rising temperature DeltaT of 290, 260.5, 314.7 and 308.5 deg C, respectively. The morphology of the thermal buckling-driven delamination was edge initiated and straight sided. The effects of the carbon dioxide (CO2) snow jet at a distance of 10 mm from the nozzle exit as well as the lift force Fdp, drag force Fd and impact force Fi were determined to be 79 X 10-3 N, 0.625 X 10-3 N and (1.65-4.95) X 10-3 N, respectively. Based on the analysis of the lift, drag and impact forces, the lifting force dominates the effects of the CO2 snow jet and is tens of times larger than the others. The experiments and analyses showed that the best distance for the CO2 snow jet to the nozzle exit was 6-10 mm.
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/17/12/009