Pulse enhanced electron emission (P3e™) arc evaporation and the synthesis of wear resistant Al–Cr–O coatings in corundum structure

Pulse enhanced electron emission (P3e™) is a new approach in PVD technology for the deposition of metal oxides. The process is dedicated to the formation of alumina-based and other metallic oxide layers and comprises high current pulse technique for the arc sources. The method allows a deposition of...

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Bibliographic Details
Published in:Surface & coatings technology 2007-12, Vol.202 (4), p.876-883
Main Authors: Ramm, Jürgen, Ante, Michael, Bachmann, Theo, Widrig, Beno, Brändle, Hans, Döbeli, Max
Format: Article
Language:English
Subjects:
Applied sciences
Cathodic arc
Contact of materials. Friction. Wear
Corundum
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology
Metal oxide
Metals. Metallurgy
Physics
Production techniques
Solid solution
Surface treatment
Surface treatments
Thermal stability
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Summary:Pulse enhanced electron emission (P3e™) is a new approach in PVD technology for the deposition of metal oxides. The process is dedicated to the formation of alumina-based and other metallic oxide layers and comprises high current pulse technique for the arc sources. The method allows a deposition of hard alumina-based coatings at substrate temperatures below 600 °C. Different oxide layers and layer combinations were prepared with this new technique illustrating the enormous potential for the design of wear resistant coatings. The layers were characterized with respect to hardness, stress, composition, crystal structure, and thermal stability. Solid solutions of (Al 1 − x Cr x ) 2O 3 could be synthesized for a composition range of 0.3 ≤ x < 1. The growth of the solid solutions has also been demonstrated at TiCN and TiAlN interfaces.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2007.05.044