The annealing effect on structural and optical properties of ZnO thin films produced by r.f. sputtering

In this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy,...

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Bibliographic Details
Published in:Superlattices and microstructures 2007-07, Vol.42 (1), p.265-269
Main Authors: Rolo, A.G., Ayres de Campos, J., Viseu, T., de Lacerda-Arôso, T., Cerqueira, M.F.
Format: Article
Language:English
Subjects:
Raman
Stress
Thin films
X-ray
ZnO
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Summary:In this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction and optical transmittance have been used. From the position of the (002) X-ray diffraction peak and the E 2 (high) mode detected in Raman spectra, the residual stress both in the as-grown and in the annealed samples has been estimated.
ISSN:0749-6036
1096-3677
DOI:10.1016/j.spmi.2007.04.069