A TEM investigation of the lattice defects and exfoliation in hydrogen-implanted CdTe

This study focuses on characterizing the defects associated with 400 keV hydrogen-implantation of CdTe, at a dose of 1 × 10 16 H + cm −2 to 5 × 10 16 H + cm −2, with subsequent annealing. Transmission electron microscopy (TEM) and a hybrid diffraction technique, large-angle convergent-beam electron...

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Bibliographic Details
Published in:Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 2004-11, Vol.113 (3), p.253-258
Main Authors: Berndt, P.R., Neethling, J.H., Franklyn, C.B., Zandbergen, H.W.
Format: Article
Language:English
Subjects:
Cadmium telluride
Ion implantation
Transmission electron microscopy
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Summary:This study focuses on characterizing the defects associated with 400 keV hydrogen-implantation of CdTe, at a dose of 1 × 10 16 H + cm −2 to 5 × 10 16 H + cm −2, with subsequent annealing. Transmission electron microscopy (TEM) and a hybrid diffraction technique, large-angle convergent-beam electron diffraction (LACBED), were used in the characterization process. Extended defects resulting from the hydrogen-implantation and annealing process include dislocations, microcracks and bubbles. Microcrack and bubble formation occurs on the cleavage planes of CdTe. Exfoliation is achieved at the higher implantation dose. High-resolution electron microscopy was used in the microstructural analysis of the microcracks. LACBED of the implanted material containing bubbles revealed a highly strained lattice with evidence of lattice distortion in-plane and in the direction of implantation.
ISSN:0921-5107
1873-4944
DOI:10.1016/j.mseb.2004.09.002