Effect of composition on surface relief morphology in TiNiCu thin films

TiNiCu films were deposited on a (100) type Si substrates by co-sputtering of TiNi and Cu targets at room temperature, and then post-annealed at 450 °C for crystallization. Significant surface relief due to martensitic transformation occurred on the film surface after cooling, and variations in surf...

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Bibliographic Details
Published in:Surface & coatings technology 2007-03, Vol.201 (12), p.5843-5849
Main Authors: Cai, M., Fu, Y.Q., Sanjabi, S., Barber, Z.H., Dickinson, J.T.
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Crystallization
Exact sciences and technology
Martensitic transformation
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Other topics in materials science
Physics
Shape memory alloys
Surface relief
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Summary:TiNiCu films were deposited on a (100) type Si substrates by co-sputtering of TiNi and Cu targets at room temperature, and then post-annealed at 450 °C for crystallization. Significant surface relief due to martensitic transformation occurred on the film surface after cooling, and variations in surface relief morphology (the size and density of martensite crystals) have been quantified with atomic force microscopy. Energy dispersive X-ray analysis showed that the surface relief morphological difference in the TiNiCu films is due to the change in composition. It was proposed that the crystallization of the amorphous thin film during annealing behaved differently with chemical composition, which in turn induced fluctuations in phase transformation temperatures at various regions, as confirmed by differential scanning calorimeter measurements.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2006.10.033