Dielectrophoretic assembly and integration of nanowire devices with functional CMOS operating circuitry

We present a novel platform for the development and deployment of nanosensors in integrated systems. The nanosensor technology is based on “striped” high aspect ratio cylindrical structures grown using porous membranes as templates. These nanostructures are manipulated using dielectrophoretic forces...

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Bibliographic Details
Published in:Microelectronic engineering 2004-07, Vol.75 (1), p.31-42
Main Authors: Evoy, S., DiLello, N., Deshpande, V., Narayanan, A., Liu, H., Riegelman, M., Martin, B.R., Hailer, B., Bradley, J.-C., Weiss, W., Mayer, T.S., Gogotsi, Y., Bau, H.H., Mallouk, T.E., Raman, S.
Format: Article
Language:English
Subjects:
Applied sciences
Design. Technologies. Operation analysis. Testing
Dielectrophoresis
Electronics
Exact sciences and technology
Integrated circuits
Integrated circuits by function (including memories and processors)
Integrated systems
Microelectronic fabrication (materials and surfaces technology)
Miscellaneous
Nano-assembly
Nanometer structures
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensors
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Summary:We present a novel platform for the development and deployment of nanosensors in integrated systems. The nanosensor technology is based on “striped” high aspect ratio cylindrical structures grown using porous membranes as templates. These nanostructures are manipulated using dielectrophoretic forces, allowing their individual assembly and characterization. This assembly also enables the development of “mixed-mode” integrated circuits that include readout, signal processing, and communications circuitry, as well as the requisite layout for the post-IC assembly of the nanostructures. We report on preliminary designs of such mixed mode systems whose layouts integrate dielectrophoretic assembly sites with a rudimentary resistance read-out circuitry.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2003.09.010