Loading…
CVD synthesis of single wall carbon nanotubes devoted to ULSI electronic applications
We report a comparison of the behaviour of different catalysts for the ethanol‐CVD growth of single‐wall carbon nanotubes (SWCNTs) on thermally grown silicon dioxide on silicon substrate. The samples have been prepared by spin‐coating organometallic salt (Co, Fe, Mo, Ni acetate, and their bimetallic...
Saved in:
Published in: | Physica Status Solidi (b) 2006-11, Vol.243 (13), p.3077-3081 |
---|---|
Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | We report a comparison of the behaviour of different catalysts for the ethanol‐CVD growth of single‐wall carbon nanotubes (SWCNTs) on thermally grown silicon dioxide on silicon substrate. The samples have been prepared by spin‐coating organometallic salt (Co, Fe, Mo, Ni acetate, and their bimetallic mixtures) water solutions (ethanol solution for Mo). As grown samples have been characterized by Raman spectroscopy, Atomic Force Microscopy and Scanning Electron Microscopy. Assuming as target the growth of high quality isolated nanotubes, the ratio in Raman spectra between the intensity of the G peak and of the D peak, has been used as main parameter to evaluate the performance of the catalytic process. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
---|---|
ISSN: | 0370-1972 1521-3951 |
DOI: | 10.1002/pssb.200669180 |