Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications

Small size, high bandwidth pressure sensors are required for instrumentation of probes and test models in aerodynamic studies of complex unsteady flows. Optical-fiber pressure sensors promise potential advantages of small size and low cost in comparison with their electrical counterparts. We describ...

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Bibliographic Details
Published in:IEEE sensors journal 2003-02, Vol.3 (1), p.102-107
Main Authors: Gander, M.J., MacPherson, W.N., Barton, J.S., Reuben, R.L., Jones, J.D.C., Stevens, R., Chana, K.S., Anderson, S.J., Jones, T.V.
Format: Article
Language:English
Subjects:
Aerodynamics
Bandwidth
Blades
Diaphragms
Fabry-Perot
Holes
Instruments
Optical fiber sensors
Optical fiber testing
Optical fibers
Optical sensors
Pressure sensors
Probes
Sensors
Trailing edges
Turbines
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Summary:Small size, high bandwidth pressure sensors are required for instrumentation of probes and test models in aerodynamic studies of complex unsteady flows. Optical-fiber pressure sensors promise potential advantages of small size and low cost in comparison with their electrical counterparts. We describe miniature Fabry-Perot cavity pressure sensors constructed by micromachining techniques in a turbine test application. The sensor bodies are 500 /spl mu/m squared, 300 /spl mu/m deep with a /spl sim/2 /spl mu/m-thick copper diaphragm electroplated on one face. The sensor cavity is formed between the diaphragm and the cleaved end of a single mode fiber sealed to the sensor by epoxy. Each sensor is addressed interferometrically in reflection by three wavelengths simultaneously, giving an unambiguous phase determination; a pressure sensitivity of 1.6 radbar/sup -1/ was measured, with a typical range of vacuum to 600 kPa. Five sensors were embedded in the trailing edge of a nozzle guide vane installed upstream of a rotor in a full-scale turbine stage transient test facility. Pressure signals in the trailing edge flow show marked structure at the 8 kHz blade passing frequency. To our knowledge, this is the first report of sensors located at the trailing edge of a normal-sized turbine blade.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2003.810099