Electric field sensor using electrostatic force deflection of a micro-spring supported membrane

An electric field sensor is shown which uses a micromachined micro-spring supported membrane as the sensing element. The sensing mechanism involves electrostatic force to deflect the membrane, and an optical position sensor to measure membrane movement. Measurement resolution was 5 kV/m for a dc fie...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2005-09, Vol.123, p.179-184
Main Authors: Roncin, A., Shafai, C., Swatek, D.R.
Format: Article
Language:English
Subjects:
Bias
Deflection
Detection
Direct current
Electric fields
Electrostatic field meter
Electrostatic voltmeter
Electrostatics
Membrane
Membranes
MEMS
Micromachining
Sensors
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Summary:An electric field sensor is shown which uses a micromachined micro-spring supported membrane as the sensing element. The sensing mechanism involves electrostatic force to deflect the membrane, and an optical position sensor to measure membrane movement. Measurement resolution was 5 kV/m for a dc field and 140 V/m for a 49 Hz ac field. It is shown that a bias voltage applied to the membrane can be used to increase measurement sensitivity. With a 17 kV/m dc bias field, a 0.3 V/m ac field at 97 Hz was detectable.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2005.02.018