Integrated high temperature gas sensor system based on bulk acoustic wave resonators

A high temperature gas sensor system based on bulk acoustic wave resonators is developed. The system consists of CeO 2 coated langasite resonators with a special electrode design to detect mechanical and conductivity changes in the sensor film. The data acquisition is performed using a specialized c...

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Bibliographic Details
Published in:	Sensors and actuators. B, Chemical Chemical, 2006-10, Vol.118 (1), p.466-471
Main Authors:	Richter, D., Fritze, H., Schneider, T., Hauptmann, P., Bauersfeld, N., Kramer, K.-D., Wiesner, K., Fleischer, M., Karle, G., Schubert, A.
Format:	Article
Language:	eng
Subjects:	Acoustics Actuators Carbon monoxide Data processing Electrodes Gas sensors High temperature microbalance Impedance analyser Langasite Resonant gas sensor Resonators Sensors
Online Access:	Get full text
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Summary:	A high temperature gas sensor system based on bulk acoustic wave resonators is developed. The system consists of CeO 2 coated langasite resonators with a special electrode design to detect mechanical and conductivity changes in the sensor film. The data acquisition is performed using a specialized compact impedance analyser and a data processing software using methods of computational intelligence. The system is tested in different atmospheres containing mixtures of CO and H 2 and exhibits selectivity to these gases.
ISSN:	0925-4005 1873-3077