Projection micro-stereolithography using digital micro-mirror dynamic mask

We present in this paper the development of a high-resolution projection micro-stereolithography (PμSL) process by using the Digital Micromirror Device (DMD™, Texas Instruments) as a dynamic mask. This unique technology provides a parallel fabrication of complex three-dimensional (3D) microstructure...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2005-05, Vol.121 (1), p.113-120
Main Authors: Sun, C., Fang, N., Wu, D.M., Zhang, X.
Format: Article
Language:English
Subjects:
Curing
Digital
Dynamic mask
Dynamics
Masks
Microstructure
Polymer
Projection
Projection micro-stereolithography
Resins
Three dimensional
Three-dimensional microfabrication
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Summary:We present in this paper the development of a high-resolution projection micro-stereolithography (PμSL) process by using the Digital Micromirror Device (DMD™, Texas Instruments) as a dynamic mask. This unique technology provides a parallel fabrication of complex three-dimensional (3D) microstructures used for micro electro-mechanical systems (MEMS). Based on the understanding of underlying mechanisms, a process model has been developed with all critical parameters obtained from the experimental measurement. By coupling the experimental measurement and the process model, the photon-induced curing behavior of the resin has been quantitatively studied. The role of UV doping has been thereafter justified, as it can effectively reduce the curing depth without compromising the chemical property of the resin. The fabrication of complex 3D microstructures, such as matrix, and micro-spring array, with the smallest feature of 0.6 μm, has been demonstrated.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2004.12.011