Activation of binary Zr–V non-evaporable getters: synchrotron radiation photoemission study

Zr–V alloy getter films were prepared on stainless steel substrates by magnetron sputtering. The thermal activation behavior of these getters was investigated by synchrotron radiation photoelectron spectroscopy using photon excitation energies of 600, 250 and 73 eV. Depth resolved results were compa...

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Bibliographic Details
Published in:Applied surface science 2005-04, Vol.243 (1), p.106-112
Main Authors: Matolín, V., Dudr, V., Fabík, S., Cháb, V., Mašek, K., Matolínová, I., Prince, K.C., Skála, T., Šutara, F., Tsud, N., Veltruská, K.
Format: Article
Language:English
Subjects:
Alloys
Analytical chemistry
Applied sciences
Chemistry
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Electron and ion emission by liquids and solids
impact phenomena
Exact sciences and technology
Gettering
Getters
Mass spectrometry (including SIMS, multiphoton ionization and resonance ionization mass spectrometry)
Materials science
Metals. Metallurgy
Photoelectron spectroscopy
Photoemission and photoelectron spectra
Physics
Secondary ion mass spectrometry
Spectrometric and optical methods
Surface treatments
Vanadium
Zirconium
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Summary:Zr–V alloy getter films were prepared on stainless steel substrates by magnetron sputtering. The thermal activation behavior of these getters was investigated by synchrotron radiation photoelectron spectroscopy using photon excitation energies of 600, 250 and 73 eV. Depth resolved results were compared to the results of the SIMS profiling. The measurements confirmed the disappearance of the superficial oxide layer covering the air-exposed Zr–V surfaces via its progressive reduction during the thermal activation. The depth sensitive results showed that the activated getter surface is covered by a residual zirconium sub-oxide.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2004.09.049