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CIP (cleaning-in-place) suitable “non-glass” pH sensor based on a Ta2O5-gate EIS structure
'Non-glass' pH-sensitive capacitive EIS (electrolyte-insulator-semiconductor) sensors consisting of a Ta2O5-gate have been investigated in terms of their CIP (cleaning-in-place) suitability. After optimisation of the process parameters, even after 30 CIP cycles, the sensors show a clear pH...
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Published in: | Sensors and actuators. B, Chemical Chemical, 2005-11, Vol.111-112 (Complete), p.423-429 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | 'Non-glass' pH-sensitive capacitive EIS (electrolyte-insulator-semiconductor) sensors consisting of a Ta2O5-gate have been investigated in terms of their CIP (cleaning-in-place) suitability. After optimisation of the process parameters, even after 30 CIP cycles, the sensors show a clear pH response and nearly linear calibration curve. The video-microscopic and scanning electron microscopy investigations do not show any visible degradation or destruction of the Ta2O5 films. |
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ISSN: | 0925-4005 |
DOI: | 10.1016/j.snb.2005.03.053 |