A Si MMIC compatible ferroelectric varactor shunt switch for microwave applications

This letter describes a ferroelectric thin-film based varactor shunt switch, for microwave and millimeterwave switching applications. Our implementation is based on a coplanar waveguide transmission line shunted by a ferroelectric varactor. The concept of switching ON and OFF is based on the dielect...

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Bibliographic Details
Published in:IEEE microwave and wireless components letters 2005-11, Vol.15 (11), p.739-741
Main Authors: Subramanyam, G., Ahamed, F., Biggers, R.
Format: Article
Language:English
Subjects:
Applied sciences
Barium
Capacitive shunt switch
Circuit properties
Coplanar transmission lines
coplanar waveguide (CPW) components
Coplanar waveguides
Dielectric thin films
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Ferroelectric materials
ferroelectric varactor
Microwave and submillimeter wave devices, electron transfer devices
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
MMICs
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Strontium
Switches
Titanium
varactor shunt switch
Varactors
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Description
Summary:This letter describes a ferroelectric thin-film based varactor shunt switch, for microwave and millimeterwave switching applications. Our implementation is based on a coplanar waveguide transmission line shunted by a ferroelectric varactor. The concept of switching ON and OFF is based on the dielectric tunability of the ferroelectric barium strontium titanium oxide (BST) thin-films. From experimental verification, the isolation of a switch with a varactor area of 75μm 2 was approximately 20dB at 35GHz and the insertion loss was below 4.5dB up to 35GHz. This letter addresses the design and experimental verification of the first ferroelectric varactor shunt switch with an Si monolithic microwave integrated circuit compatible process.
ISSN:1531-1309
2771-957X
1558-1764
2771-9588
DOI:10.1109/LMWC.2005.858992