Noise analysis and characterization of a sigma-delta capacitive microaccelerometer

This paper reports a high-sensitivity low-noise capacitive accelerometer system with one micro-g//spl radic/Hz resolution. The accelerometer and interface electronics together operate as a second-order electromechanical sigma-delta modulator. A detailed noise analysis of electromechanical sigma-delt...

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Bibliographic Details
Published in:IEEE journal of solid-state circuits 2006-02, Vol.41 (2), p.352-361
Main Authors: Kulah, H., Chae, J., Yazdi, N., Najafi, K.
Format: Article
Language:English
Subjects:
Accelerometers
Amplifiers
Applied sciences
Audio frequencies
Capacitive readout
Circuit noise
Circuit properties
Circuits
Delta-sigma modulation
Dielectric, amorphous and glass solid devices
Dynamical systems
Electric, optical and optoelectronic circuits
Electromechanical sensors
Electronic circuits
Electronics
Exact sciences and technology
Frequency
inertial sensors
micro-g
microaccelerometers
Modulators
Noise
Operational amplifiers
Sampling
Sampling methods
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
sigma-delta
Signal convertors
Studies
switched capacitor
Testing
Thermal sensors
Thermoelectric, pyroelectric devices, etc
Voltage
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Summary:This paper reports a high-sensitivity low-noise capacitive accelerometer system with one micro-g//spl radic/Hz resolution. The accelerometer and interface electronics together operate as a second-order electromechanical sigma-delta modulator. A detailed noise analysis of electromechanical sigma-delta capacitive accelerometers with a final goal of achieving sub-/spl mu/g resolution is also presented. The analysis and test results have shown that amplifier thermal and sensor charging reference voltage noises are dominant in open-loop mode of operation. For closed-loop mode of operation, mass-residual motion is the dominant noise source at low sampling frequencies. By increasing the sampling frequency, both open-loop and closed-loop overall noise can be reduced significantly. The interface circuit has more than 120 dB dynamic range and can resolve better than 10 aF. The complete module operates from a single 5-V supply and has a measured sensitivity of 960 mV/g with a noise floor of 1.08 /spl mu/g//spl radic/Hz in open-loop. This system can resolve better than 10 /spl mu/g//spl radic/Hz in closed-loop.
ISSN:0018-9200
1558-173X
DOI:10.1109/JSSC.2005.863148