Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

A submicron thick and defect-free palladium-silver (Pd-Ag) alloy membrane is fabricated on a supporting microsieve by using microfabrication techniques. The microfabrication process also creates a robust wafer-scale membrane module, which can easily be inserted into a membrane holder to have gas-tig...

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Bibliographic Details

Published in:	Journal of microelectromechanical systems 2005-02, Vol.14 (1), p.113-124
Main Authors:	Hien Duy Tong, Gielens, F.C., Gardeniers, J.G.E., Jansen, H.V., Berenschot, J.W., de Boer, M.J., de Boer, J.H., van Rijn, C.J.M., Elwenspoek, M.C.
Format:	Article
Language:	eng
Subjects:	110 wafers Biomembranes Chemical industry Chemical technology Chemistry Exact sciences and technology Fluxes Fossil fuels Fuel processing industries Helium Hydrogen Hydrogen separation Hydrogen storage Instruments, apparatus, components and techniques common to several branches of physics and astronomy Joints Mechanical instruments, equipment and techniques membrane module membrane reactor Membranes microfabrication technology Micromechanical devices and systems Palladium base alloys Pd-Ag membrane Petroleum Physics Production Purification Separation SiN microsieves
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