In situ X-ray studies of vapor phase epitaxy of PbTiO3

As part of a program to understand and control the structure of ferroelectric thin films grown by metal organic vapor phase epitaxy (MOVPE), we have used X-ray scattering to observe the surface structure of PbTiO3 films during and following growth. Moderately high energy (24 keV) X-rays are used to...

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Bibliographic Details
Published in:Physica. B, Condensed matter Condensed matter, 2003-08, Vol.336 (1-2), p.81-89
Main Authors: STEPHENSON, G. B, FONG, D. D, RAMANA MURTY, M. V, STREIFFER, S. K, EASTMAN, J. A, AUCIELLO, O, FUOSS, P. H, MUNKHOLM, A, AANERUD, M. E. M, THOMPSON, Carol
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Structure of solids and liquids
crystallography
Vapor phase epitaxy
growth from vapor phase
X-ray diffraction and scattering
X-ray scattering (including small-angle scattering)
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Summary:As part of a program to understand and control the structure of ferroelectric thin films grown by metal organic vapor phase epitaxy (MOVPE), we have used X-ray scattering to observe the surface structure of PbTiO3 films during and following growth. Moderately high energy (24 keV) X-rays are used to penetrate the chamber walls for in situ measurements in the high-temperature, reactive MOVPE environment. Performing measurements in situ allows us to study the growth process in real time, to control the thickness of the films to sub-unit-cell accuracy, to observe the surface structure in equilibrium with the vapor, and to preserve film stoichiometry during high-temperature study by maintaining an overpressure of PbO. While the higher X-ray energy also permits a large volume of reciprocal space to be mapped, it presents challenges for surface scattering due to the small critical angle. Examples of results will be presented from studies of surface structure dynamics, crystal growth, and ferroelectric stripe domains in thin films.
ISSN:0921-4526
1873-2135
DOI:10.1016/S0921-4526(03)00273-4