An image sensor which captures 100 consecutive frames at 1000000 frames/s

An image sensor for a video camera of 1000000 frames per second (fps) was developed. The specifications of the developed sensor are as follows: 1) frame rate: 1000000 fps; 2) pixel count: 81 120 (=312/spl times/260) pixels; 3) total number of successive frames: 103 frames; 4) gray levels: 10 b; and...

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Bibliographic Details
Published in:IEEE transactions on electron devices 2003-01, Vol.50 (1), p.144-151
Main Authors: Etoh, T.G., Poggemann, D., Kreider, G., Mutoh, H., Theuwissen, A.J.P., Ruckelshausen, A., Kondo, Y., Maruno, H., Takubo, K., Soya, H., Takehara, K., Okinaka, T., Takano, Y.
Format: Article
Language:English
Subjects:
Charge coupled devices
Charge coupled image sensors
Frames
Micrometers
Pixels
Sensors
Specifications
Synchronization
Video cameras
Wire
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Summary:An image sensor for a video camera of 1000000 frames per second (fps) was developed. The specifications of the developed sensor are as follows: 1) frame rate: 1000000 fps; 2) pixel count: 81 120 (=312/spl times/260) pixels; 3) total number of successive frames: 103 frames; 4) gray levels: 10 b; and 5) open area of each pixel (fill factor): 580 square micrometers (13%). The overwriting function is installed for synchronization of image capturing with occurrence of the target event. Sensitivity is significantly high with the large photogate. Some innovative technologies were introduced to achieve ultrahigh performance, including slanted linear CCD in situ storage, curving design procedure, and a CCD switch with fewer metal shunting wires. They are applicable to the development of other new high-performance image sensors.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2002.806474