Effect of Coarser Grains on Sintering of AlN

Aluminum nitride (AlN) is an attractive material for electronic devices because it has high thermal conductivity (320 W/mK), good electrical insulation, and thermal expansion coefficient close to silicon. We have reported that liquid phase sintering behavior of the AlN ceramics was corresponded with...

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Bibliographic Details
Published in:Key engineering materials 2003-01, Vol.247, p.87-90
Main Authors: Nakata, H., Hoshina, T., Kuibira, A., Komeya, Katsutoshi, Tatami, Junichi, Meguro, Takeshi, Tsuge, Akihiko
Format: Article
Language:English
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Summary:Aluminum nitride (AlN) is an attractive material for electronic devices because it has high thermal conductivity (320 W/mK), good electrical insulation, and thermal expansion coefficient close to silicon. We have reported that liquid phase sintering behavior of the AlN ceramics was corresponded with lattice constant c and wettability, namely dihedral angle between AlN and liquid phase. Furthermore, in our previous study, it was clarified that densification of the AlN sintered body with coarser grains was limited in comparison to that without them. In this study, we investigated densification behavior of AlN powder with coarser grains forecasted on the change in lattice constant c and dihedral angle between liquid and solid interface during sintering. Green bodies from powder mixture of AlN with 5.0wt%Y2O3 addition were fired at the temperature range of 1650 to 1850DGC in 0.6 MPa N2. The lattice constant c of AlN grains, the relative density, the dihedral angle between AlN and liquid phase of the sintered body were evaluated. As a result, densification of the AlN sintered body with coarser grains was delayed in comparison to that without them. Change of the dihedral angle between AlN and liquid phase is late in comparison to that without them. Change of the dihedral angle, oxygen content in AlN grain is restricted until high temperature. Therefore, it seems when coarser grains are added, movement of oxygen from AlN grain is interrupted.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.247.87