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Triboluminescence of ZnS:Mn Films Deposited on Quartz Substrates with ZnO Buffer Layers
Authors investigated the effect of ZnO films used as buffer layers on the triboluminescence (TrL) intensity of ZnS:Mn thin films on quartz substrates using the RF magnetron sputtering method and annealing technique. Highly oriented ZnO film was first deposited on quartz glass substrate and then the...
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Published in: | Japanese Journal of Applied Physics 2002, Vol.41 (Part 1, No. 8), p.5259-5261 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Citations: | Items that cite this one |
Online Access: | Get full text |
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Summary: | Authors investigated the effect of ZnO films used as buffer layers on the triboluminescence (TrL) intensity of ZnS:Mn thin films on quartz substrates using the RF magnetron sputtering method and annealing technique. Highly oriented ZnO film was first deposited on quartz glass substrate and then the ZnS:Mn film was deposited on the highly oriented ZnO film. By annealing at 5% H2 in Ar ambient, the crystallinity of both ZnO and ZnS:Mn films was improved. Addition of the ZnO buffer layer improves the TrL intensity of the ZnS:Mn films. 26 refs. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.41.5259 |