Study of YBa sub(2)Cu sub(3)O sub(7-x)/SrTiO sub(3) heterostructures on 2 double prime LaAlO sub(3) substrates for microwave applications

Agile microwave components require tunable material homogeneous on large area. SrTiO sub(3) (STO) material, associated with the superconductor YBa sub(2 )Cu sub(3)O sub(7-x) (YBCO), was chosen for its electric properties at low temperature. Two different sputtering systems were used for STO depositi...

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Bibliographic Details
Published in:Physica. C, Superconductivity Superconductivity, 2002-08, Vol.372-376, p.667-670
Main Authors: Lemaitre, Yves, Marcilhac, Bruno, Mansart, Daniel, Siejka, Julius, Mage, Jean-Claude
Format: Article
Language:English
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Summary:Agile microwave components require tunable material homogeneous on large area. SrTiO sub(3) (STO) material, associated with the superconductor YBa sub(2 )Cu sub(3)O sub(7-x) (YBCO), was chosen for its electric properties at low temperature. Two different sputtering systems were used for STO deposition: plane target in face to face configuration (film A) and inverted cylindrical target in off-axis configuration (film B). Then superconductor film was grown ex situ on film A and in situ on film B. The crystallographic properties were studied by X-rays diffraction and the cationic composition by EDX and RBS. The electric properties epsilon , tan delta and agility were studied by patterning resonators composed of two interdigited combs. In STO films, we observed a balance between the deposition rate and the homogeneity of the thickness and of the cationic composition. High-quality YBCO (400 nm)/STO (400 nm) heterostructures with R sub(s) = 0.4 m Omega were obtained on 2 double prime LaAlO sub(3) substrates. copyright 2002 Elsevier Science B.V. All rights reserved.
ISSN:0921-4534