Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications

This paper presents the fabrication and characteristics of a magnetically actuated micromechanical scanner/stage with five degrees of freedom ( X,Y,Z, and tilt about the X and Y axes) intended for use as a compact positioning device in parallel scanning probe applications. The entire scanner has a v...

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Bibliographic Details
Published in:Microelectronic engineering 2000-06, Vol.53 (1), p.509-512
Main Authors: Rothuizen, H., Drechsler, U., Genolet, G., Häberle, W., Lutwyche, M., Stutz, R., Widmer, R., Vettiger, P.
Format: Article
Language:English
Subjects:
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Lithography, masks and pattern transfer
Microelectronic fabrication (materials and surfaces technology)
Microelectronics: LSI, VLSI, ULSI
integrated circuit fabrication technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:This paper presents the fabrication and characteristics of a magnetically actuated micromechanical scanner/stage with five degrees of freedom ( X,Y,Z, and tilt about the X and Y axes) intended for use as a compact positioning device in parallel scanning probe applications. The entire scanner has a volume of 30×30×2 mm 3. It shows a DC displacement amplitude to drive current ratio of 330 nm/mA along the X and Y axes, of 50 nm/mA along the Z axis, and has a resonant frequency in the X/Y plane of 61 Hz.
ISSN:0167-9317
1873-5568
DOI:10.1016/S0167-9317(00)00366-X