Diffraction gratings in dry developed dichromated gelatin films

A new method for using dichromated gelatin films in photolithography has been recently developed in our laboratory. In this paper, we describe the experiments carried out for making efficient surface-relief diffraction gratings using that method. Basically, gratings are obtained by developing, in an...

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Published in:Thin solid films 1998-04, Vol.317 (1), p.343-346
Main Authors: Quintana, J.A, Boj, P.G, Crespo, J, Vallés-Abarca, J.A, Villalvilla, J.M
Format: Article
Language:English
Subjects:
Applied sciences
Dichromated gelatin film
Diffraction
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Photolithography
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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container_title Thin solid films
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creator Quintana, J.A
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description A new method for using dichromated gelatin films in photolithography has been recently developed in our laboratory. In this paper, we describe the experiments carried out for making efficient surface-relief diffraction gratings using that method. Basically, gratings are obtained by developing, in an oxygen electron cyclotron resonance stream, the interference of two coherent waves recorded on a dichromated gelatin film. Diffraction efficiency and incident angle selectivity of 0.5 μm period gratings are studied as a function of development time, and results are compared with theoretical predictions.
doi_str_mv 10.1016/S0040-6090(97)00649-4
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subjects Applied sciences
Dichromated gelatin film
Diffraction
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Photolithography
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title Diffraction gratings in dry developed dichromated gelatin films
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