Diffraction gratings in dry developed dichromated gelatin films

A new method for using dichromated gelatin films in photolithography has been recently developed in our laboratory. In this paper, we describe the experiments carried out for making efficient surface-relief diffraction gratings using that method. Basically, gratings are obtained by developing, in an...

Full description

Bibliographic Details

Published in:	Thin solid films 1998-04, Vol.317 (1), p.343-346
Main Authors:	Quintana, J.A, Boj, P.G, Crespo, J, Vallés-Abarca, J.A, Villalvilla, J.M
Format:	Article
Language:	English
Subjects:	Applied sciences Dichromated gelatin film Diffraction Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Photolithography Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!