Combinatorial studies of Zn-Al-O and Zn-Sn-O transparent conducting oxide thin films

In this work, we discuss the development of combinatorial deposition and analysis tools for the investigation of and the optimization of transparent conducting oxides. Library deposition by co-sputtering followed by optical analysis is shown to be a facile way to achieve these goals. Initial work fo...

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Bibliographic Details

Published in:	Thin solid films 2002-05, Vol.411 (1), p.152-160
Main Authors:	Perkins, J.D, del Cueto, J.A, Alleman, J.L, Warmsingh, C, Keyes, B.M, Gedvilas, L.M, Parilla, P.A, To, B, Readey, D.W, Ginley, D.S
Format:	Article
Language:	English
Subjects:	Combinatorial Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Laser deposition Materials science Methods of deposition of films and coatings film growth and epitaxy Physics TCO Thin film Transparent conducting oxides
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