(001)-TEXTURED Cu2S THIN FILMS DEPOSITED BY RF REACTIVE SPUTTERING

Cu2S thin films were deposited on float glass substrates by rf reactive sputtering. XRD measurements, including grazing incidence geometry, showed that the sputtered Cu2S films had hexagonal structure with a strong (001) fiber texture. The thickness, surface density and roughness of the sputtered la...

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Bibliographic Details
Published in:Jpn.J.Appl.Phys ,Part 1. Vol. 41, no. 7A, pp. 4630-4634. 2002 Part 1. Vol. 41, no. 7A, pp. 4630-4634. 2002, 2002, Vol.41 (7A), p.4630-4634
Main Authors: He, Y, Kriegseis, W, Blasing, J, Polity, A, Kramer, T, Hasselkamp, D
Format: Article
Language:English
Online Access:Get full text
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Summary:Cu2S thin films were deposited on float glass substrates by rf reactive sputtering. XRD measurements, including grazing incidence geometry, showed that the sputtered Cu2S films had hexagonal structure with a strong (001) fiber texture. The thickness, surface density and roughness of the sputtered layers were characterized by X-ray reflectivity. SEM from both top view and cross section revealed good morphology and uniform microstructure of the sputtered films. RBS and energy dispersive X-ray analysis were used to examine the composition of the films. By the optical transmission measurements, the indirect and direct band gaps of the films were estimated to be 1.19 and 1.82 eV, resp. 24 refs.
ISSN:0021-4922
DOI:10.1143/JJAP.41.4630