Ion-burst method for positive and negative ion species measurements

A simple method for positive and negative ion species measurements utilizing ion bursts is presented. In this ion-burst method, the ion bursts are excited by a potential applied to a mesh grid immersed in the plasma. Since the velocity of the ion burst is dependent on the excitation voltage and the...

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Bibliographic Details
Published in:Thin solid films 2001-06, Vol.390 (1), p.212-216
Main Authors: Yoshimura, S, Ichiki, R, Shindo, M, Kawai, Y
Format: Article
Language:English
Subjects:
Ar/SF 6 plasma
Atomic, molecular, ion, and heavy-particle collisions
Electric discharges
Elementary processes in plasma
Exact sciences and technology
Ion burst
Ion species measurement
Mass spectrometry
Other gas discharges
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Pseudowave
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Summary:A simple method for positive and negative ion species measurements utilizing ion bursts is presented. In this ion-burst method, the ion bursts are excited by a potential applied to a mesh grid immersed in the plasma. Since the velocity of the ion burst is dependent on the excitation voltage and the ion mass, the ion species can be determined from measurement of the ion-burst velocity. In the DC discharge of an Ar/SF 6 gas mixture, the positive ion species are found to be Ar +, SF 3 + and SF 5 +, and the negative ion species are found to be F − and SF 6 −. These results are compared with the spectrum analysis using a quadrupole mass spectrometry system and show qualitative agreement with them.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(01)00951-8