A comparison of a passive (filtered) and an active (driven) probe for RF plasma diagnostics

Saved in:
Bibliographic Details
Published in:Measurement science & technology 1991-08, Vol.2 (8), p.795-800
Main Authors: Annaratone, B M, Braithwaite, N S J
Format: Article
Language:English
Subjects:
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma diagnostic techniques and instrumentation
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/2/8/014