ALD HfO2 Films for Defining Microelectrodes for Electrochemical Sensing and Other Applications

Microelectrodes are used in a wide range of applications from analytical electrochemistry and biomolecular sensing to in vivo implants. While a variety of insulating materials have been used to define the microelectrode active area, most are not suitable for nanoscale electrodes (

Bibliographic Details

Published in:	ACS applied materials & interfaces 2019-07, Vol.11 (29), p.26082-26092
Main Authors:	Chia, Charmaine, Shulaker, Max M, Provine, J, Jeffrey, Stefanie S, Howe, Roger T
Format:	Article
Language:	English
Online Access:	Get full text
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