Ptychographic characterisation of polymer compound refractive lenses manufactured by additive technology

The recent success in the development of high-precision printing techniques allows one to manufacture free-standing polymer structures of high quality. Two-photon polymerization lithography is a mask-less technique with down to 100 nm resolution that provides full geometric freedom. It has recently...

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Bibliographic Details
Published in:Optics express 2019-03, Vol.27 (6), p.8639-8650
Main Authors: Lyubomirskiy, M, Koch, F, Abrashitova, K A, Bessonov, V O, Kokareva, N, Petrov, A, Seiboth, F, Wittwer, F, Kahnt, M, Seyrich, M, Fedyanin, A A, David, C, Schroer, C G
Format: Article
Language:English
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Summary:The recent success in the development of high-precision printing techniques allows one to manufacture free-standing polymer structures of high quality. Two-photon polymerization lithography is a mask-less technique with down to 100 nm resolution that provides full geometric freedom. It has recently been applied to the nanofabrication of X-ray compound refractive lenses (CRLs). In this article we report on the characterization of two sets of CRLs of different design produced by two-photon polymerization-induced lithography.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.27.008639