New technology for multi-sensor silicon needles for biomedical applications

A multi-sensor silicon needle including two ion-sensitive field effect transistor (ISFET) sensors, a platinum pseudo-reference electrode (Pt) and a temperature sensor has been fabricated by using a CMOS-compatible technology and silicon micromachining. This paper presents a summary of the fabricatio...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2001-08, Vol.78 (1), p.279-284
Main Authors: Errachid, A, Ivorra, A, Aguiló, J, Villa, R, Zine, N, Bausells, J
Format: Article
Language:English
Subjects:
Cardiovascular surgery
CMOS integrated circuits
Electrodes
Ion sensitive field effect transistors
Ischemia
ISFET sensor
Micromachining
Multi-sensor
Platinum
Sensor data fusion
Silicon needle
Temperature sensor
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Summary:A multi-sensor silicon needle including two ion-sensitive field effect transistor (ISFET) sensors, a platinum pseudo-reference electrode (Pt) and a temperature sensor has been fabricated by using a CMOS-compatible technology and silicon micromachining. This paper presents a summary of the fabrication process and results of the device characterisation. The feasibility of the fabrication technology has been demonstrated and all devices have operated satisfactorily, with a response showing good sensitivity and linearity. The multi-sensor has been developed for the detection of myocardial ischemia during cardiac surgery.
ISSN:0925-4005
1873-3077
DOI:10.1016/S0925-4005(01)00826-7