Silicon-based micro-gas sensors for detecting formaldehyde

Micro-formaldehyde gas sensor of palladium doped tin dioxide was fabricated on silicon substrate. Finite element software ANSYS was used to analyze the thermal field distribution. In order to obtain a uniform thermal field distribution in the micro-gas sensor, the width of the marginal four strips o...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2009-03, Vol.136 (2), p.399-404
Main Authors: Wang, Jing, Zhang, Peng, Qi, Jin-Qing, Yao, Peng-Jun
Format: Article
Language:English
Subjects:
Adsorption
Computer programs
Detection
Electrodes
Formaldehyde
Gas sensor
Oxygen
Palladium
Q1
Sensors
Silicon
Silicon based
Silicon substrates
Strip
Tin
Tin dioxide
Tin oxides
X-ray photoelectron spectroscopy
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Summary:Micro-formaldehyde gas sensor of palladium doped tin dioxide was fabricated on silicon substrate. Finite element software ANSYS was used to analyze the thermal field distribution. In order to obtain a uniform thermal field distribution in the micro-gas sensor, the width of the marginal four strips of the heating electrode was designed to be 50 μm and the width of the central seven strips 25 μm. Undoped and 1 mol% Pd-doped SnO 2 thin films were synthesized by sol–gel method on silicon substrates. XRD and XPS spectra of the films were analyzed. The response of the 1 mol% Pd-doped SnO 2 micro-gas sensor to formaldehyde was much higher than that of the undoped SnO 2 micro-gas sensor. This experimental observation was also supported by the XPS O (1s) patterns of the films which showed that doping 1 mol% Pd into SnO 2 increased the value of O a/O l, i.e., the ratio of adsorption and lattice oxygens. Formaldehyde of 0.03 ppm concentration was detected by the 1 mol% Pd-doped SnO 2 micro-gas sensor.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2008.12.056