A reproducible method for μm precision alignment of PDMS microchannels with on-chip electrodes using a mask aligner

This paper describes a reproducible method for μm precision alignment of polydimethylsiloxane (PDMS) microchannels with coplanar electrodes using a conventional mask aligner for lab-on-a-chip applications. It is based on the use of a silicon mold in combination with a PMMA sarcophagus for precise co...

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Bibliographic Details
Published in:Biomicrofluidics 2017-11, Vol.11 (6), p.064111-064111
Main Authors: Cottet, Jonathan, Vaillier, Clarisse, Buret, François, Frénéa-Robin, Marie, Renaud, Philippe
Format: Article
Language:English
Subjects:
Alignment
Electric power
Electrodes
Engineering Sciences
Magnets
Microchannels
Polydimethylsiloxane
Polymethyl methacrylate
Regular
Silicone resins
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Summary:This paper describes a reproducible method for μm precision alignment of polydimethylsiloxane (PDMS) microchannels with coplanar electrodes using a conventional mask aligner for lab-on-a-chip applications. It is based on the use of a silicon mold in combination with a PMMA sarcophagus for precise control of the parallelism between the top and bottom surfaces of molded PDMS. The alignment of the fabricated PDMS slab with electrodes patterned on a glass chip is then performed using a conventional mask aligner with a custom-made steel chuck and magnets. This technique allows to bond and align chips with a resolution of less than 2 μm.
ISSN:1932-1058
1932-1058
DOI:10.1063/1.5001145